METHOD FOR EVALUATING INSIDE OF SURFACE OF SOLID MATERIAL

• Main Authors: FUKUMA SHINJI, IWAI YOSHIRO
• Format: Patent
• Language: English; Japanese
• Published: 06.12.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a method for evaluating the inside of the surface of a solid material which can evaluate a local physical characteristic related to a fine structure formed in the inside of the surface of the solid material.SOLUTION: The method for evaluating the inside of the surface of a solid material includes the steps of: measuring the shape of an erosion mark formed by projecting abrasive grains on the surface of the solid material for each predetermined projection amount; calculating erosion measurement data and projection amount data on the basis of the depth of the erosion for each projection amount; calculating a local erosion rate of an arbitrary erosion position on the basis of the erosion measurement data and the projection amount data; and evaluating a local physical characteristic on the basis of the distribution of a local erosion rate.SELECTED DRAWING: Figure 4 【課題】本発明は、固体材料の表面内部に形成された微細構造に関連する局所的な物理的特性について評価することができる固体材料の表面内部評価方法を提供することを目的とする。【解決手段】固体材料の表面内部評価方法は、固体材料表面に砥粒を投射して形成されたエロージョン痕の形状を所定の投射量毎に測定し、投射量毎のエロージョン深さに基づいてエロージョン測定データ及び投射量データを算出し、エロージョン測定データ及び投射量データに基づいて任意のエロージョン位置の局所エロージョン率を算出し、局所エロージョン率の分布に基づいて局所的な物理的特性の評価を行う。【選択図】図４