MANUFACTURING METHOD FOR SEMICONDUCTOR DEVICE

• Main Author: KAKEHATA TETSUYA
• Format: Patent
• Language: English; Japanese
• Published: 01.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC HEATING; ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a transistor having smaller variation, higher reliability, and stable electric characteristic despite of having a minute structure, and increase the performance and reliability also in a semiconductor device including the transistor.SOLUTION: An insulator is formed on a substrate, an open...