MEASUREMENT SYSTEM, MEASUREMENT INSTRUMENT AND MEASUREMENT METHOD

• Main Authors: YOKOYAMA KIMIHIRO, AMIKURA NORIHIKO, HATANAKA TAKAYUKI
• Format: Patent
• Language: English; Japanese
• Published: 01.12.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To provide a technique to simply measure electrostatic capacity indicating a shift amount of a conveyance position of a conveyance object.SOLUTION: A measurement system according to an exemplary embodiment, acquires a measurement value indicating electrostatic capacity between a measurement instrument and a conveyance fork for conveying the measurement instrument. The conveyance fork includes a target electrode. The measurement instrument includes a first sensor provided in a base substrate. The first sensor includes a center electrode and a peripheral electrode. The center electrode acquires electrostatic capacity reflecting a distance from the target electrode. The peripheral electrode is arranged around the center electrode, and acquires electrostatic capacity reflecting a shift amount in a horizontal direction to the target electrode included in the conveyance fork.SELECTED DRAWING: Figure 6 【課題】搬送対象の搬送位置のずれ量を表す静電容量を簡便に測定する技術を提供する。【解決手段】例示的実施形態に係る測定システムは、測定器と測定器を搬送する搬送フォークとの間の静電容量を表す測定値を取得する。搬送フォークは、ターゲット電極を含む。測定器は、ベース基板に設けられた第１センサを備える。第１センサは、中心電極と周辺電極とを含む。中心電極は、ターゲット電極との距離を反映する静電容量を取得する。周辺電極は、中心電極の周囲に配置され、搬送フォークの備えるターゲット電極に対する水平方向におけるずれ量を反映する静電容量を取得する。【選択図】図６