LASER BEAM MACHINE AND CONDENSING DIAMETER CALIBRATION METHOD OF LASER BEAM MACHINE

To suppress deterioration in processing quality due to adhesion of pollutant on a protective glass.SOLUTION: A laser beam machine comprises: a focal position changing part which changes a relative position between a focal position of a laser beam oscillated by a laser oscillator and penetrating thro...

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Bibliographic Details
Main Authors MATSUO RYUTA, MOTOYOSHI TAKASHI
Format Patent
LanguageEnglish
Japanese
Published 24.11.2023
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Summary:To suppress deterioration in processing quality due to adhesion of pollutant on a protective glass.SOLUTION: A laser beam machine comprises: a focal position changing part which changes a relative position between a focal position of a laser beam oscillated by a laser oscillator and penetrating through a lens and a work-piece by changing a relative position between the lens and the work-piece; a protective glass which is arranged on a laser beam path between the lens and the work-piece; a storage part which stores, when pollutant is adhered to the protective glass, a relation between a deviation amount of the focal position of the laser beam and a condensing diameter at a position at a prescribed distance from the focal position; a deviation amount acquisition part which acquires a current deviation amount at the focal position of the laser beam; a condensing diameter estimation part which estimates a current condensing diameter at the position of the laser beam based on the current deviation amount acquired by the deviation amount acquisition part and the relation stored in the storage part; and a calibration execution part which controls the focal position changing part through the current deviation amount and the current condensing diameter to calibrate the current condensing diameter.SELECTED DRAWING: Figure 9 【課題】保護ガラスに汚染物が付着することによる加工品質の低下を抑制する。【解決手段】レーザ加工機は、レンズとワークとの相対位置を変更することによって、レーザ発振器から発振されてレンズを透過するレーザ光の焦点位置とワークとの相対位置を変更する焦点位置変更部と、レンズとワークとの間のレーザ光の経路上に配置された保護ガラスと、保護ガラスに汚染物が付着したときの、レーザ光の焦点位置のずれ量と焦点位置から所定距離の位置における集光径との関係を記憶する記憶部と、レーザ光の焦点位置の現在のずれ量を取得するずれ量取得部と、ずれ量取得部によって取得された現在のずれ量と記憶部に記憶された関係とを用いて、レーザ光の位置における現在の集光径を推定する集光径推定部と、現在のずれ量と現在の集光径とを用いて焦点位置変更部を制御することによって、現在の集光径を補正する補正実行部と、を備える。【選択図】図9
Bibliography:Application Number: JP20220078582