MICROFABRICATION DEVICE, MICROFABRICATION METHOD, TRANSFER MOLD, AND TRANSFER OBJECT

• Main Authors: NOGAMI TOMOHIKO, NODA KAZUHIKO, DOI KATSUHIRO, SAKURAI KYOKO
• Format: Patent
• Language: English; Japanese
• Published: 14.11.2023
• Subjects: AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING; BORING; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDEDFOR; SHAPING OR JOINING OF PLASTICS; TRANSPORTING; TURNING; WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL

To provide a novel and improved microfabrication device, microfabrication method, transfer mold and transfer object that can inhibit generation of defects.SOLUTION: A microfabrication device comprises a tool mounting portion, a predetermined cutting tool, an oscillator, and a controller. The controller performs a cutting process to satisfy at least one of: a cutting condition (1) that oscillations at a start point and an end point of each set are in phase with each other; and a cutting condition (2) that oscillations of the sets are in phase with each other.SELECTED DRAWING: Figure 1A 【課題】欠陥の発生を抑制することが可能な、新規かつ改良された微細加工装置、微細加工方法、転写型、及び転写物を提供する。【解決手段】工具設置部と、所定の切削工具、振動部及び制御部とを備え、制御部は、以下の切削条件（１）、（２）の少なくとも一方が満たされるように切削工程を行うことを特徴とする、微細加工装置が提供される。切削条件（１）：各セットの始点と終点で振動の位相が揃っている。切削条件（２）：各セット間で振動の位相が揃っている。【選択図】図１Ａ