PIEZOELECTRIC ACTUATOR, MANUFACTURING METHOD THEREOF, DROPLET DISCHARGE HEAD, AND ULTRASONIC DEVICE

• Main Authors: TAKABE HONKI, HIRAI EIKI
• Format: Patent
• Language: English; Japanese
• Published: 10.11.2023
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PERFORMING OPERATIONS; PRINTING; PUBLIC ADDRESS SYSTEMS; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

To provide a piezoelectric actuator including a piezoelectric material having excellent crystallinity.SOLUTION: A piezoelectric actuator includes a substrate, and a first piezoelectric element and a second piezoelectric element formed on the substrate. The first piezoelectric element includes a first lower electrode, a first piezoelectric material, and a first upper electrode. The second piezoelectric element includes a second lower electrode, a second piezoelectric material, and a second upper electrode. The side face of the first lower electrode is not covered with the first piezoelectric material, and the side face of the second lower electrode is not covered with the second piezoelectric material. The piezoelectric actuator includes a common electrode formed on the substrate and connected to the first upper electrode and the second upper electrode, and insulation layers positioned between the common electrode and the first lower electrode, and between the common electrode and the second lower electrode.SELECTED DRAWING: Figure 4 【課題】良好な結晶性を有する圧電体を備える圧電アクチュエーターを提供する。【解決手段】基板と、基板上に形成される第１圧電素子および第２圧電素子と、を備える圧電アクチュエーター。第１圧電素子は、第１下部電極と、第１圧電体と、第１上部電極と、を有する。第２圧電素子は、第２下部電極と、第２圧電体と、第２上部電極と、を有する。第１下部電極の側面は第１圧電体に覆われておらず、第２下部電極の側面は第２圧電体に覆われていない。圧電アクチュエーターは、基板上に形成され、第１上部電極および第２上部電極に接続される共通電極と、共通電極と第１下部電極との間、および共通電極と第２下部電極との間に位置する絶縁層と、を有する。【選択図】図４