OPTICAL SCANNER AND ABNORMALITY DETECTION METHOD

• Main Authors: NISHIURA YOSUKE, ABE MASAAKI, NAONO TAKAYUKI
• Format: Patent
• Language: English; Japanese
• Published: 10.11.2023
• Subjects: OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS

To provide an optical scanner and an abnormality detection method allowing high-speed detection of an abnormal operation of a mirror during the operation.SOLUTION: An optical scanner of the present disclosure comprises: a micromirror device including a mirror that has a reflection surface reflecting light and can be swung around at least one axis, an actuator that swings the mirror, and a piezoelectric element that generates and outputs an electromotive force through the swinging of the mirror; a control unit that controls the operation of the actuator; and an abnormality detection device that detects an abnormal operation of the mirror based on the amount of variation over time of an output signal from the piezoelectric element.SELECTED DRAWING: Figure 6 【課題】ミラーの異常動作を動作中に高速に検知することを可能とする光走査装置及び異常検知方法を提供する。【解決手段】本開示の光走査装置は、光を反射する反射面を有し、少なくとも１つの軸周りに揺動可能なミラーと、ミラーを揺動させるアクチュエータと、ミラーの揺動により起電力を発生して出力する圧電素子と、を含むマイクロミラーデバイスと、アクチュエータの動作を制御する制御装置と、圧電素子からの出力信号の時間的な変動量に基づいて、ミラーの異常動作を検知する異常検知装置と、を備える。【選択図】図６