FLOW RATE MEASUREMENT DEVICE, FLOW RATE MEASUREMENT METHOD, AND CALIBRATION METHOD OF FLOW RATE CONTROL DEVICE

• Main Authors: NISHINO KOJI, YAMASHITA SATORU, NAGASE MASAAKI, IKEDA NOBUKAZU
• Format: Patent
• Language: English; Japanese
• Published: 10.11.2023
• Subjects: CONTROLLING; MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TESTING

To provide a flow rate measurement device that can measure a gas flow rate controlled by a flow rate control device in reduced time.SOLUTION: A flow rate measurement device 20, which is connected to a flow path interposed between a downstream valve V0 provided on the downstream side of a flow rate c...