FLOW RATE MEASUREMENT DEVICE, FLOW RATE MEASUREMENT METHOD, AND CALIBRATION METHOD OF FLOW RATE CONTROL DEVICE

• Main Authors: NISHINO KOJI, YAMASHITA SATORU, NAGASE MASAAKI, IKEDA NOBUKAZU
• Format: Patent
• Language: English; Japanese
• Published: 10.11.2023
• Subjects: CONTROLLING; MEASURING; MEASURING VOLUME, VOLUME FLOW, MASS FLOW OR LIQUIDLEVEL; METERING BY VOLUME; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES; TESTING

To provide a flow rate measurement device that can measure a gas flow rate controlled by a flow rate control device in reduced time.SOLUTION: A flow rate measurement device 20, which is connected to a flow path interposed between a downstream valve V0 provided on the downstream side of a flow rate control device 10 and a gas using device, comprises: a gas inlet Gin communicating with the flow path on the downstream side of the downstream valve; a gas outlet Gout communicating with an exhaust system; a first built-in valve AV1 for build-up provided in the flow path between the gas inlet and the gas outlet; a second built-in valve AV2 provided between the first built-in valve and the gas outlet; a first pressure sensor 21 and a first temperature sensor 23 for measuring the pressure and temperature of the first built-in valve on the upstream side; a second pressure sensor 22 and a second temperature sensor 24 for measuring the pressure and temperature between the first built-in valve and the second built-in valve; and a control circuit 25.SELECTED DRAWING: Figure 1 【課題】 流量制御装置によって制御されたガスの流量を短縮された時間で測定することができる流量測定装置を提供する。【解決手段】 流量測定装置２０は、流量制御装置１０の下流側に設けられた下流バルブＶ０とガス使用装置との間の流路に接続されており、下流バルブの下流側の流路に連通するガス入口Ｇｉｎと、排気系に連通するガス出口Ｇｏｕｔと、ガス入口とガス出口との間の流路に設けられたビルドアップ用の第１内蔵バルブＡＶ１と、第１内蔵バルブとガス出口との間に設けられた第２内蔵バルブＡＶ２と、第１内蔵バルブの上流側の圧力および温度を測定する第１圧力センサ２１および第１温度センサ２３と、第１内蔵バルブと第２内蔵バルブとの間の圧力および温度を測定する第２圧力センサ２２および第２温度センサ２４と、制御回路２５とを備えている。【選択図】図１