WAFER MOUNTING TABLE

• Main Authors: KUNO TATSUYA, INOUE SEIYA
• Format: Patent
• Language: English; Japanese
• Published: 08.11.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To fasten a wafer mounting table including a brittle cooling substrate to an installation plate without any problems and also prevent the occurrence of temperature singularities on a wafer.SOLUTION: A wafer mounting table 10 includes an alumina substrate 20, a brittle cooling substrate 30, and a ductile female screw member 38. The alumina substrate 20 has a wafer mounting surface 22a on the top surface and incorporates an electrode 26 therein. The cooling substrate 30 is joined to the bottom surface of the alumina substrate 20, and a coolant passage 32 is formed in the cooling substrate. The female screw member 38 is housed in a housing hole 36 that opens on the bottom surface of the cooling substrate 30 while axial rotation is restricted and while the female screw member is engaged with an engaging part of the housing hole 36. The female screw member 38 can be screwed with a male screw of a bolt 98 inserted from a bottom surface side of the cooling substrate 30. The housing hole 36 is provided inside the coolant passage 32.SELECTED DRAWING: Figure 1 【課題】脆性な冷却基材を備えたウエハ載置台を設置板に支障なく締結でき、且つウエハに温度特異点が生じるのを防止する。【解決手段】ウエハ載置台１０は、アルミナ基材２０と、脆性の冷却基材３０と、延性の雌ネジ部材３８とを備える。アルミナ基材２０は、上面にウエハ載置面２２ａを有し、電極２６を内蔵する。冷却基材３０は、アルミナ基材２０の下面に接合され、冷媒流路３２が形成されている。雌ネジ部材３８は、冷却基材３０の下面に開口する収納穴３６内に軸回転を規制された状態で且つ収納穴３６の係合部に係合した状態で収納されている。雌ネジ部材３８は、冷却基材３０の下面側から差し込まれるボルト９８の雄ネジと螺合可能である。収納穴３６は、冷媒流路３２の内部に設けられている。【選択図】図１