MAGNETIC SENSOR DEVICE

• Main Authors: OTA NORIKAZU, WATABE MORIYA, HIRABAYASHI HIROSHI, YAMAWAKI KAZUMA, MIYAZAKI SHUHEI
• Format: Patent
• Language: English; Japanese
• Published: 31.10.2023
• Subjects: ELECTRICITY; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING ELECTRIC VARIABLES; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

To provide a magnetic sensor device in which influence of stress applied is suppressed.SOLUTION: A magnetic sensor device 1 comprises magnetic sensors 10, 20, 30, and a support medium 4. The center of mass of an element arrangement area of the magnetic sensors 10, 20, 30 is displaced from center of mass C4 of a reference plane 4a of the support medium 4. Each of the magnetic sensors 10, 20, 30 includes four resistance parts composed of a plurality of MR elements. Magnetization of a free layer 54 in two resistance parts contains a component in a third magnetization direction. Magnetization of the free layer 54 in each of the remaining two resistance parts contains a component in a fourth magnetization direction opposite to the third magnetization direction.SELECTED DRAWING: Figure 8 【課題】印加される応力の影響を抑制できるようにした磁気センサ装置を実現する。【解決手段】磁気センサ装置１は、磁気センサ１０，２０，３０と、支持体４とを備えている。磁気センサ１０，２０，３０の素子配置領域の重心は、支持体４の基準平面４ａの重心Ｃ４からずれている。磁気センサ１０，２０，３０の各々は、複数のＭＲ素子によって構成された４つの抵抗部を含んでいる。２つの抵抗部の各々における自由層５４の磁化は、第３の磁化方向の成分を含んでいる。他の２つの抵抗部の各々における自由層５４の磁化は、第３の磁化方向とは反対の第４の磁化方向の成分を含んでいる。【選択図】図８