PIEZOELECTRIC ELEMENT, MICROPHONE AND METHOD OF MANUFACTURING PIEZOELECTRIC ELEMENT

• Main Authors: KATAUE TAKAHARU, USUI TAKAHIDE, YAMADA HIDEO, SUZUKI YOSHIMI, IKEGAMI NAOKATSU
• Format: Patent
• Language: English; Japanese
• Published: 23.10.2023
• Subjects: DEAF-AID SETS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRICITY; LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKEACOUSTIC ELECTROMECHANICAL TRANSDUCERS; PUBLIC ADDRESS SYSTEMS

To provide a piezoelectric element, a microphone, and a method of manufacturing the piezoelectric element capable of reducing an increase in man-hours.SOLUTION: A piezoelectric element includes: a piezoelectric film 40 arranged on a support 10; an electric film 50 laminated on the piezoelectric film 40; through electrodes 61a, 62a formed inside hole parts 61b, 62b penetrating the piezoelectric film 40; and an interlayer insulating film 82 which is formed on the wall surfaces of the holes 61a and 62a and on the top of the piezoelectric film 40, and insulates the piezoelectric film 40 from the through electrodes 61b, 62b. A vibrating part 20 includes a piezoelectric film 40 and an electrode film 50, and has a support region 21a supported by the support 10 and a floating region 21b floating from the support 10. The floating region 21b has a plurality of vibration regions partitioned by slits 30, and in the slits 30, an additional thin film 81 made of the same material as the interlayer insulating film 82 is arranged.SELECTED DRAWING: Figure 2 【課題】工数の増加を低減できる圧電素子、マイクロフォン、および圧電素子の製造方法を提供する。【解決手段】支持体１０に配置された圧電膜４０と、圧電膜４０に積層された電極膜５０と、圧電膜４０を貫通する孔部６１ａ、６２ａの内部に形成された貫通電極６１ｂ、６２ｂと、孔部６１ａ、６２ａの壁面および圧電膜４０の上部に形成され、圧電膜４０と貫通電極６１ｂ、６２ｂとを絶縁させる層間絶縁膜８２と、を備え、振動部２０は、圧電膜４０および電極膜５０を含み、支持体１０に支持される支持領域２１ａと、支持体１０から浮遊している浮遊領域２１ｂとを有し、浮遊領域２１ｂは、スリット３０によって区画された複数の振動領域を有し、スリット３０には、層間絶縁膜８２と同じ材料で構成された付加薄膜８１が配置されている。【選択図】図２