METHOD OF MANUFACTURING SELF-POWERED VIBRATION SENSOR

• Main Authors: YE JIACHEN, YANG GENG, YANG HUAYONG, XU KAICHEN, ZHAO HAONAN, DONG ZHEYU, LUO HUAYU
• Format: Patent
• Language: English; Japanese
• Published: 17.10.2023
• Subjects: CONVERSION OR DISTRIBUTION OF ELECTRIC POWER; ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; GENERATION; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT; MEASURING; MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK; PHYSICS; TESTING

SOLUTION: There are provided a fully soft self-powered vibration sensor and a method of manufacturing the same. The method comprises: manufacturing a two-dimensional porous carbon electrode having an origami structure by using a laser carbonization technology; transferring the two-dimensional porous carbon electrode onto a three-dimensional PDMS cavity by using a metal mold transfer method; and engraving micro-structures on surfaces of the porous carbon electrode and a PDMS thin film by using a laser etching technology. The sensor is formed of the PDMS thin film, a liquid metal droplet, the porous carbon electrode, and PDMS cavity assembled tightly in order from top to bottom. When the sensor is excited by vibrations, the liquid metal droplet and PDMS thin film are rubbed against each other to be electrically charged, the surface of the PDMS thin film comes to carry negative charges, thereby, a movement of the liquid metal droplet is enabled to output of a current through electrostatic induction.EFFECT: Supply of stable electric signal output is enabled with a liquid metal droplet being suppressed from sticking onto a contact surface, by flexibly controlling laser scan parameters without requiring a complicated physical synthesizing process nor chemical synthesizing process.SELECTED DRAWING: Figure 1 【解決手段】全軟体自己駆動型振動センサ及びその製造方法であって、方法は、レーザ炭化技術によって折り紙構造を有する２次元多孔質炭素電極を製造し、金型トランスファー法によって２次元多孔質炭素電極を３次元ＰＤＭＳキャビティ上にトランスファーし、レーザエッチング技術によって多孔質炭素電極及びＰＤＭＳ薄膜の表面に微細構造を彫刻する。センサは、ＰＤＭＳ薄膜、液体金属液滴、多孔質炭素電極及びＰＤＭＳキャビティを上から下へ順に緊密に組み立ててなる。センサが振動励起を受けると、液体金属液滴とＰＤＭＳ薄膜とが摩擦して帯電し、ＰＤＭＳ薄膜の表面は安定的な負電荷を持ち、液体金属液滴の運動は静電気誘導を通じて電流を出力できる。【効果】複雑な物理的合成プロセスや化学的合成プロセスを必要とせず、レーザ走査パラメータを柔軟に制御することにより、液体金属液滴が接触表面に付着しないようにし、安定的な電気信号出力を供給する。【選択図】図１