COIL DEVICE AND MANUFACTURING METHOD OF THE COIL DEVICE

• Main Authors: IMASAKA TOSHIHIRO, TORII YOHEI, YOSHINO MANABU, YAMAGUCHI YASUO, SHITOMI TAKUICHIRO
• Format: Patent
• Language: English; Japanese
• Published: 16.10.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRICITY; INDUCTANCES; MAGNETS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES; TRANSFORMERS

To provide a coil device that includes a first coil and a second coil which are insulated by polyimide, and suppresses the deformation of polyimide.SOLUTION: A coil device comprises: a substrate 1 having a first main surface and a second main surface opposite to the first main surface; a first insulation film 2 that is provided so as to be contacted to the substrate 1 in a first direction side in the case where a direction directed from the second main surface to the first main surface is a first direction; a first coil part 8 that is provided so as to be contacted to the first direction side to the first insulation film 2, and is a spiral-like conductive film; a second insulation film 4 that is provided so as to cover the first direction side of a first coil part 8 and the first direction side of the first insulation film 2 where the first coil part 8 is not provided; a second coil part 12 that is provided so as to be contacted to the first direction side of a second insulation film 4, and is the spiral-like conductive film; and a first groove 9 that is provided to the second insulation film 4, and includes a width to the first direction on the first direction side of the second insulation film 4 in a region inner from an outer peripheral end of the second coil part 12 in a plan view.SELECTED DRAWING: Figure 1 【課題】ポリイミドで絶縁された第１のコイル及び第２のコイルを有し、ポリイミドの変形を抑制したコイルデバイスを提供する。【解決手段】第１主面と第１主面に対向した第２主面を有する基板１と、第２主面から第１主面に向かう方向を第１方向とした場合に、基板１に第１方向側で接して設けられた第１の絶縁膜２と、第１の絶縁膜２に第１方向側で接して設けられ、渦巻状の導体膜である第１のコイル部８と、第１のコイル部８の第１方向側及び第１のコイル部８が設けられていない第１の絶縁膜２の第１方向側を覆うようにして設けられた第２の絶縁膜４と、第２の絶縁膜４の第１方向側に接して設けられ、渦巻状の導体膜である第２のコイル部１２と、第２の絶縁膜４に設けられ、平面視において第２のコイル部１２の外周端より内側の領域に、第２の絶縁膜４の第１方向側の面に第１方向に幅を有する第１の溝９と、を備える。【選択図】図１