COATER, DEPOSITION METHOD AND METHOD OF MANUFACTURING SOLID OXIDE TYPE ELECTRIC CHEMICAL CELL

• Main Authors: YOSHIDA SHIN, TANAHASHI YOSHIO, OZEKI ATSUSHI, HIWATARI KENICHI, SUEHIRO TETSUDAI
• Format: Patent
• Language: English; Japanese
• Published: 16.10.2023
• Subjects: APPARATUS FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TO SURFACES, IN GENERAL; BASIC ELECTRIC ELEMENTS; ELECTRICITY; PERFORMING OPERATIONS; PROCESSES FOR APPLYING LIQUIDS OR OTHER FLUENT MATERIALS TOSURFACES, IN GENERAL; PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSIONOF CHEMICAL INTO ELECTRICAL ENERGY; SPRAYING OR ATOMISING IN GENERAL; TRANSPORTING

To provide a coater which can coat a substrate rotating around a predetermined axis, particularly, a flexed substrate rotating circumferentially, with slurry in a predetermined dimension, a deposition method and a method of manufacturing a solid oxide type electric chemical cell.SOLUTION: A coater 1 can determine a first eccentric amount on the basis of a first distance measured by a first distance measurement instrument 37, and a second eccentric amount on the basis of a second distance measured by a second distance measurement instrument 39. Since the position of a nozzle 53 is moved on the basis of the first eccentric amount and the second eccentric amount, slurry can be discharged out of the nozzle 53 with the distance between a substrate 3 and the nozzle 53 approximately constant. Thus, the substrate 3 can be coated with slurry so as to make a desired thickness or width even when the substrate 3 is flexed in the second axial direction or the third axial direction as viewed from the first axial direction, for example.SELECTED DRAWING: Figure 1 【課題】所定の軸を中心して回転する基体上に、特に周方向に回転する湾曲した基体上に、スラリーを所望の寸法で塗布することができる塗布装置、成膜方法及び固体酸化物形電気化学セルの製造方法を提供すること。【解決手段】塗布装置１では、第１距離測定器３７によって測定された第１の距離に基づいて、第１の偏心量を求めることができ、第２距離測定器３９によって測定された第２の距離に基づいて、第２の偏心量を求めることができる。そして、第１の偏心量と第２の偏心量とに基づいてノズル５３の位置を移動するので、基体３とノズル５３との距離を略一定の状態としてノズル５３からスラリーを吐出することができる。これにより、基体３が例えば第１の軸方向からみて第２の軸方向や第３の軸方向に湾曲している場合でも、所望の厚みや幅となるようにスラリーを塗布することができる。【選択図】図１