SAMPLE FOR DETECTING HYDROGEN PERMEATION AND MANUFACTURING METHOD THEREFOR

• Main Authors: MIYAUCHI NAOYA, YAKABE TARO, NAKAMURA AKIKO
• Format: Patent
• Language: English; Japanese
• Published: 13.10.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a sample for detecting hydrogen permeation with which it is made possible to shield gas discharges from the sample by sublimation or evaporation and suppress the occurrence of charge-ups, and a method for manufacturing the sample.SOLUTION: Provided is a sample for detecting hydrogen permeation that excites, and desorbs, hydrogen atoms having penetrated from the rear of a sample or having gushed from the inside of material of the sample by scan electrons of a scanning electron microscope in an ultra-vacuum, and acquires an ESD image of the desorbed hydrogen ions synchronously with electron beam scanning of the scanning electron microscope. A sample 40 for detecting hydrogen permeation is composed that comprises: a sample body 41 that has a conductive or an insulating region 42 disposed in a surface region, the conductive or the insulating region including a material that is likely to discharge a gas due to sublimation or evaporation; and a conductive thin film 43 that is disposed in the whole of the surface of the sample body including the conducive or the insulating region and has hydrogen permeability, and that shields gas discharges from the sample body.SELECTED DRAWING: Figure 1 【課題】試料からの昇華又は蒸発によるガス放出を遮蔽することができると共に、チャージアップの発生を抑止することができるようにした水素透過検出のための試料及びその製造方法を提供する。【解決手段】試料の背面から透過した水素原子あるいは当該試料の材料内部から湧出した水素原子を、超高真空中で走査型電子顕微鏡の走査電子により電子遷移誘起で励起させて水素イオンを脱離させ、該脱離した水素イオンのＥＳＤ像を、走査型電子顕微鏡の電子線の走査に同期して取得する、水素透過検出のための試料であって、表面領域に配設された導電領域又は絶縁領域４２を備え且つ該導電領域又は絶縁領域が昇華又は蒸発によりガス放出しやすい材料を含む試料本体４１と、試料本体の導電領域又は絶縁領域を含む表面全体に亘って配設された水素透過性を備え且つ試料本体からのガス放出を遮蔽する導電性薄膜４３と、を備える水素透過検出のための試料４０を構成する。【選択図】図１