HEAT TRANSFER MEMBER, METHOD FOR MANUFACTURING HEAT TRANSFER MEMBER, AND PLASMA PROCESSING DEVICE

To provide a heat transfer member that has high plasma resistance and can maintain high adhesion with various members for a long period of time, and a method for manufacturing the same, and a plasma processing device that allows the temperature of each component within a chamber to be easily stabili...

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Bibliographic Details
Main Authors ZUSHI TOSHIHIRO, HIRANO KOSEI, YAMAMOTO TETSUYA, SHOJI YOSHIO
Format Patent
LanguageEnglish
Japanese
Published 13.10.2023
Subjects
BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
SEMICONDUCTOR DEVICES
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Summary:To provide a heat transfer member that has high plasma resistance and can maintain high adhesion with various members for a long period of time, and a method for manufacturing the same, and a plasma processing device that allows the temperature of each component within a chamber to be easily stabilized even when the chamber is in a vacuum state.SOLUTION: In a heat transfer member made of a fired body of a molded product containing a fluororesin or a fluorine elastomer, the hardness measured using a type AM durometer in accordance with JIS K 6253-3:2012 is 7 or more lower than that of the molded product.SELECTED DRAWING: Figure 1 【課題】耐プラズマ性が高く、各種部材との密着性を高い状態で長期間にわたって維持できる伝熱部材とその製造方法、および、チャンバ内が真空状態であってもチャンバ内の各部品の温度が安定しやすいプラズマ処理装置を提供する。【解決手段】伝熱部材は、フッ素系樹脂又はフッ素系エラストマーを含む成形物の焼成体からなる伝熱部材であって、ＪＩＳ Ｋ ６２５３－３：２０１２に準拠したタイプＡＭデュロメータを用いて測定した硬度が、前記成形物と比較して７以上低い。【選択図】図１
Bibliography:Application Number: JP20220057297