ADHESIVE SHEET AND METHOD FOR MANUFACTURING SEMICONDUCTOR DEVICE

• Main Authors: YAMAGUCHI SEITARO, UMEMOTO NATSUKI
• Format: Patent
• Language: English; Japanese
• Published: 05.10.2023
• Subjects: ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; ADHESIVES; BASIC ELECTRIC ELEMENTS; CHEMISTRY; DYES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; MISCELLANEOUS APPLICATIONS OF MATERIALS; MISCELLANEOUS COMPOSITIONS; NATURAL RESINS; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; PAINTS; POLISHES; SEMICONDUCTOR DEVICES; USE OF MATERIALS AS ADHESIVES

To provide an adhesive sheet that can hold a workpiece well and separate the workpiece well without requiring irradiation with active energy ray, and, furthermore, that has excellent antistatic property.SOLUTION: Provided is an adhesive sheet, which is an adhesive sheet for handling a workpiece that includes a substrate and an adhesive layer laminated on one side of the substrate, and in which the substrate contains an antistatic agent, the adhesive layer is made of a non-active energy ray-curable adhesive formed from an adhesive composition containing at least an acrylic polymer and a tackifier, and the tackifier is an alkylene glycol modified rosin ester.SELECTED DRAWING: None 【課題】ワークを良好に保持可能でありながらも、活性エネルギー線の照射を要せず、ワークを良好に分離可能であり、さらには優れた帯電防止性を有する粘着シートを提供する。【解決手段】基材と、前記基材の片面側に積層された粘着剤層とを備えた、ワークの取り扱いのための粘着シートであって、前記基材が、帯電防止剤を含有するものであり、前記粘着剤層が、アクリル系重合体および粘着付与剤を少なくとも含有する粘着性組成物から形成された非活性エネルギー線硬化性の粘着剤からなり、前記粘着付与剤が、アルキレングリコール変性ロジンエステルである粘着シート。【選択図】なし