PRESSURE-TYPE FLOW RATE CONTROL DEVICE AND VAPORIZATION SUPPLY DEVICE

• Main Authors: NISHINO KOJI, NAKATANI TAKANORI, IKEDA NOBUKAZU, MORISAKI KAZUYUKI, HIDAKA ATSUSHI
• Format: Patent
• Language: English; Japanese
• Published: 05.10.2023
• Subjects: CONTROLLING; PHYSICS; REGULATING; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES

To provide a flow rate control device that can appropriately control a flow rate over a wide control range.SOLUTION: A pressure-type flow rate control device 20 includes: a control valve 22; a pressure sensor 24 provided on the downstream side of the control valve; a first throttle section 27S provided in a main flow path PS on the downstream side of the pressure sensor; an on-off valve 28 provided in a branch flow path PL that branches from the main flow path between the pressure sensor and the first throttle section and merges with the main flow path on the downstream side of the first throttle section; a second throttle section 27L provided in the branch flow path; a control mechanism 32; and a fluid detection mechanism 30 for detecting fluid flowing through the on-off valve 28. Flow rate control is performed by controlling the control valve 22 based on open/close state of the on-off valve 28 and output of the pressure sensor 24.SELECTED DRAWING: Figure 1 【課題】 広い制御範囲で適切に流量制御を行うことができる流量制御装置を提供する。【解決手段】 圧力式流量制御装置２０は、コントロール弁２２と、コントロール弁の下流側に設けられた圧力センサ２４と、圧力センサの下流側の主流路ＰＳに設けられた第１絞り部２７Ｓと、圧力センサと第１絞り部との間で主流路から分岐し第１絞り部の下流側で主流路と合流する分岐流路ＰＬに設けられた開閉弁２８と、分岐流路に設けられた第２絞り部２７Ｌと、制御機構３２と、開閉弁２８を流れる流体を検知する流体検知機構３０とを備え、開閉弁２８の開閉状態及び圧力センサ２４の出力に基づいてコントロール弁２２を制御することによって流量制御を行う。【選択図】 図１