OPTICAL CHARACTERISTIC MEASURING DEVICE AND OPTICAL CHARACTERISTIC MEASUREMENT METHOD

To measure at least two kinds of optical characteristics by using one device.SOLUTION: A pulse forming part 3 generates pulse light PL and can change a time waveform of the pulse light PL according to types of optical characteristics to be measured. A waveform measurement part 5 measures the time wa...

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Bibliographic Details
Main Authors SHIGEMATSU KYOHEI, SATOZONO HIROSHI, WATANABE KOYO, INOUE TAKU, TAKAHASHI HISANARI
Format Patent
LanguageEnglish
Japanese
Published 05.10.2023
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Summary:To measure at least two kinds of optical characteristics by using one device.SOLUTION: A pulse forming part 3 generates pulse light PL and can change a time waveform of the pulse light PL according to types of optical characteristics to be measured. A waveform measurement part 5 measures the time waveform of the pulse light PL outputted from a measurement object B after being applied to the measurement object B. An optical system 4 has a dimming part 41 which has an attenuation factor for one wavelength component composing the pulse light PL larger than an attenuation factor for another wavelength component composing the pulse light PL. The optical system 4 can switch between a first state in which the dimming part 41 is disposed on an optical path of the pulse light PL outputted from the measurement object B and a second state in which the dimming part 41 is not disposed on the optical path. An analysis part 6 obtains optical characteristics of the measuring object B on the basis of the time waveform measured by the waveform measurement part 5.SELECTED DRAWING: Figure 1 【課題】二種類以上の光学特性の計測を、一つの装置を用いて行うことを可能にする。【解決手段】パルス形成部3は、パルス光PLを生成するとともに、計測される光学特性の種類に応じてパルス光PLの時間波形を変更可能である。波形計測部5は、計測対象物Bに照射されたのち計測対象物Bから出力されたパルス光PLの時間波形を計測する。光学系4は、パルス光PLを構成する一の波長成分に対する減衰率がパルス光PLを構成する別の波長成分に対する減衰率よりも大きい減光部41を有する。光学系4は、計測対象物Bから出力されるパルス光PLの光路上に減光部41が配置される第1の状態と、該光路上に減光部41が配置されない第2の状態とを相互に切り替え可能とされている。解析部6は、波形計測部5において計測された時間波形に基づいて、計測対象物Bの光学特性を求める。【選択図】図1
Bibliography:Application Number: JP20220046443