CHEMICAL SUBSTANCE DETECTOR AND CHEMICAL SUBSTANCE DETECTION METHOD

• Main Authors: HASEGAWA HIDEKI, SUGIYAMA MASUYUKI, TAKADA YASUAKI, KUMANO SHUN
• Format: Patent
• Language: English; Japanese
• Published: 04.10.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To efficiently inspect by a simple configuration.SOLUTION: A chemical substance detector comprises: a heating device 1 that heats a wiping member, with chemical substances sticking to an inspection object wiped off; an ion source 5 that ionizes chemical substance-related steam having occurred in the heating device 1 as the wiping member is heated; a mass spectrometer 61 that analyzes the ion generated by the ion source 5; an intake pump 302 that draws in the steam generated in the heating device 1; pipings 201-203 that connect the heating device 1 and the intake pump 302; and a branch part BR which is disposed in the pipings 201-203, and branches the piping 201 into two so that one is connected to the ion source 5 and the other is connected to the intake pump 302.SELECTED DRAWING: Figure 1 【課題】簡易な構成で効率的な検査を行うことを課題とする。【解決手段】検査対象に付着している化学物質を拭き取った拭取部材を加熱する加熱装置１と、拭取部材が加熱されることで、加熱装置１で発生した化学物質に関する蒸気をイオン化するイオン源５と、イオン源５で生成したイオンを分析する質量分析計６１と、加熱装置１で発生した蒸気を吸引する吸気ポンプ３０２と、加熱装置１と吸気ポンプ３０２とを接続する配管２０１～２０３と、配管２０１～２０３に設けられ、一方がイオン源５に接続され、他方が吸気ポンプ３０２に接続されるよう配管２０１を分岐する分岐部ＢＲと、を有することを特徴とする。【選択図】図１