SURFACE SHAPE INSPECTION METHOD

• Main Authors: KAJIYA SATORU, SHIRAISHI YASUNARI, OGATA KEIZO
• Format: Patent
• Language: English; Japanese
• Published: 27.09.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS; OPTICS; PHYSICS; TESTING

To solve the problem that, when inspecting a planar inspection object, it is difficult to find out defects by a method that requires adjusting focus to the inspection surface with an optical microscope.SOLUTION: Provided is a surface shape inspection method for analyzing the surface shape of an inspection object by an image analyzer using an optical microscope that has a camera and an image analyzer and comes with an image analysis function. With this inspection method, the surface shape of the inspection object is identified by analyzing a difference between a plurality of images by analyzing the images captured by the optical microscope with the image analysis function at the distance position of an objective lens that is different from a reference distance position, with the reference position defined as the position of the objective lens that is focused to the surface of the inspection object when the optical axis direction of the objective lens and the normal direction of the inspection object surface are the same, or captured at an angle position at which the optical axis and the normal direction form an angle other than a reference angle position, with the reference angle position defined as an angle for the case where the optical axis direction and the normal direction are the same.SELECTED DRAWING: Figure 2 【課題】平面状被検査体の検査の際、光学顕微鏡で検査表面にピントを合わせて検査する方法では、欠陥部分を見出すのが難しかった。【解決手段】表面形状検査方法において、カメラと画像解析装置を有する画像解析機能付き光学顕微鏡を用い、被検査体の表面形状を画像解析装置により解析する表面形状検査方法において、対物レンズの光軸方向と被検査体表面の法線方向が同じ場合の、被検査体の表面に対してピントが合う対物レンズの位置を基準距離位置とし基準距離位置とは異なる対物レンズの距離位置、あるいは、光軸方向と法線方向が同じ場合の角度を基準角度位置とし前記光軸と前記法線とが基準角度位置以外の角度をなす角度位置で、画像解析機能付き光学顕微鏡で撮像した画像を、画像解析装置により画像処理を施して解析することにより、複数の画像間の差を解析することで被検査体の表面形状を特定するようにした。【選択図】 図２