HEAT SHIELD
To provide a heat shield that can measure temperature to evaluate the temperature distribution of a cathode during heating.SOLUTION: A heat shield 10 includes a cylindrical portion 11 that surrounds the outer periphery of a cathode 20 that extends in the axial direction, extends in the axial directi...
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Main Authors | , , , |
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Format | Patent |
Language | English Japanese |
Published |
06.09.2023
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Subjects | |
Online Access | Get full text |
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