HEAT SHIELD

To provide a heat shield that can measure temperature to evaluate the temperature distribution of a cathode during heating.SOLUTION: A heat shield 10 includes a cylindrical portion 11 that surrounds the outer periphery of a cathode 20 that extends in the axial direction, extends in the axial directi...

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Bibliographic Details
Main Authors HASHIBA MICHITARO, SODEKODA TATSUYA, KAWASAKI TOMOAKI, ITO HIKO
Format Patent
LanguageEnglish
Japanese
Published 06.09.2023
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Summary:To provide a heat shield that can measure temperature to evaluate the temperature distribution of a cathode during heating.SOLUTION: A heat shield 10 includes a cylindrical portion 11 that surrounds the outer periphery of a cathode 20 that extends in the axial direction, extends in the axial direction, and has heat insulating properties, and a slit 13A is formed in a region R of the circumferential surface of the cylindrical portion 11 that overlaps with the cathode in the axial direction, and the slit 13A penetrates the cylindrical portion 11 toward the cathode 20 and extends in a predetermined direction.SELECTED DRAWING: Figure 1 【課題】加熱時のカソードの温度分布を評価するための温度計測が可能なヒートシールドを提供する。【解決手段】ヒートシールド10は、軸方向に延伸するカソード20の外周を囲むと共に軸方向に延伸し、断熱性を有する円筒部11を備え、円筒部11の周面のうち、軸方向においてカソードと重なる領域Rにスリット13Aが形成され、スリット13Aは、カソード20に向けて円筒部11を貫通すると共に所定の方向に延伸している。【選択図】図1
Bibliography:Application Number: JP20220027529