LIQUID EJECTION HEAD AND LIQUID EJECTION DEVICE
To prevent accuracy of temperature measurement from decreasing due to a resistor even in a case where the resistor for measuring a temperature and a piezoelectric body are used together.SOLUTION: A liquid ejection head comprises: a pressure chamber substrate provided with a plurality of pressure cha...
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Main Authors | , , |
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Format | Patent |
Language | English Japanese |
Published |
22.08.2023
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Subjects | |
Online Access | Get full text |
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Summary: | To prevent accuracy of temperature measurement from decreasing due to a resistor even in a case where the resistor for measuring a temperature and a piezoelectric body are used together.SOLUTION: A liquid ejection head comprises: a pressure chamber substrate provided with a plurality of pressure chambers; a piezoelectric body which is driven to apply a pressure to a liquid in the plurality of pressure chambers and contains lead atoms; a first electrode provided on a first surface of two surfaces of the piezoelectric body; a second electrode provided on a second surface of the two surfaces of the piezoelectric body, which is opposite to the first surface; drive wiring electrically connected to the first electrode and the second electrode and configured to apply a voltage for driving the piezoelectric body; a resistor which is formed of the same material as any one of the first electrode, the second electrode, and the drive wiring and configured to measure a temperature of the liquid in the plurality of pressure chambers, and a diffusion prevention layer provided between the resistor and the piezoelectric body and configured to prevent the lead atoms contained in the piezoelectric body from diffusing into the resistor.SELECTED DRAWING: Figure 4
【課題】温度を計測するための抵抗体と圧電体とを併用する場合であっても、抵抗体による温度の計測精度が低下することを抑制すること。【解決手段】液体吐出ヘッドは、複数の圧力室が設けられた圧力室基板と、前記複数の圧力室内の液体に圧力を付与するために駆動され、鉛原子を含む圧電体と、前記圧電体の有する2つの面のうち、第1面に設けられた第1電極と、前記圧電体の有する2つの面のうち、前記第1面とは反対側の第2面に設けられた第2電極と、前記第1電極及び前記第2電極に電気的に接続され、前記圧電体を駆動するための電圧を印加する駆動配線と、前記第1電極、前記第2電極、前記駆動配線のいずれかと同じ材料で形成され、前記複数の圧力室内の液体の温度を計測するための抵抗体と、前記抵抗体と前記圧電体との間に設けられ、前記圧電体に含まれる鉛原子が前記抵抗体に拡散することを抑制するための拡散抑制層と、を有する。【選択図】図4 |
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Bibliography: | Application Number: JP20220018426 |