DETECTION DEVICE

• Main Author: GOTO TETSUHIRO
• Format: Patent
• Language: English; Japanese
• Published: 10.08.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a detection device capable of increasing a detection precision.SOLUTION: A detection device includes a piezoelectric part 21 having a piezoelectric layer 14, and a first electrode and a second electrode provided while sandwiching at least one portion of the piezoelectric layer, and a sensitive film 18 that is provided in a side opposite to the piezoelectric layer of the first electrode and causes mass to be changed by a change in the environment, and also includes a resonator 40 that corresponds to a change in the mass, and causes a change in at least one of a resonance frequency and an antiresonant frequency in an even-order vibration mode as a vibration mode of elastic waves capable of performing electric excitation differing from an odd-order mode after providing the sensitive film in the piezoelectric part when a frequency capable of performing electric excitation in the piezoelectric part in which the sensitive film is not provided is set to an odd-order mode of elastic waves, and a detector 45 for detecting a change in the environment on the basis of a change in at least the one frequency.SELECTED DRAWING: Figure 2 【課題】検出感度を向上させることができる検出装置を提供する。【解決手段】検出装置は、圧電層１４と、前記圧電層の少なくとも一部を挟み設けられた第１電極および第２電極と、を備える圧電部２１と、前記第１電極の前記圧電層の反対側に設けられ、環境の変化により質量が変化する感応膜１８と、を備え、前記質量の変化に対応し、前記感応膜が設けられていない前記圧電部での電気励振が可能な周波数を弾性波の奇数次モードとしたときに、前記感応膜を前記圧電部に設けたあと、前記奇数次モードとは異なる電気励振が可能な弾性波の振動モードである偶数次振動モードにおける共振周波数および反共振周波数の少なくとも一方の周波数が変化する共振器４０と、前記少なくとも一方の周波数の変化に基づき、前記環境の変化を検出する検出器４５とを備える。【選択図】図２