APPARATUS DIAGNOSIS DEVICE, APPARATUS DIAGNOSIS METHOD, PLASMA PROCESSING APPARATUS, AND SEMICONDUCTOR DEVICE PRODUCING SYSTEM

• Main Authors: KAMACHI YOSHITO, SUMIYA MASAHIRO, UMEDA SHOTA, TAMAOKI KENJI
• Format: Patent
• Language: English; Japanese
• Published: 28.07.2023
• Subjects: CALCULATING; COMPUTING; COUNTING; DATA PROCESSING SYSTEMS OR METHODS, SPECIALLY ADAPTED FORADMINISTRATIVE, COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORYOR FORECASTING PURPOSES; PHYSICS; SYSTEMS OR METHODS SPECIALLY ADAPTED FOR ADMINISTRATIVE,COMMERCIAL, FINANCIAL, MANAGERIAL, SUPERVISORY OR FORECASTINGPURPOSES, NOT OTHERWISE PROVIDED FOR

To provide a plasma processing apparatus in which occurrence of a possible unplanned maintenance is predicted, and a necessary maintenance work and a time point in a planned maintenance to which the work is to be added are immediately determined from the view point of the cost of high-priority maintenance.SOLUTION: An apparatus diagnosis device includes a deterioration level estimation unit that estimates the deterioration level of a plasma processing apparatus upon receiving an output of a sensor mounted on the plasma processing apparatus, a maintenance work occurrence possibility estimation unit that calculates the possibility of occurrence of an unplanned maintenance work which is not included in the original maintenance plan on the basis of the deterioration level estimated by the deterioration level estimation unit, an actual maintenance cost calculation unit that calculates an actual maintenance cost, and a plan-added maintenance cost calculation unit that outputs a maintenance plan amendment obtained by making an amendment to the original maintenance plan to which the unplanned maintenance work is added on the basis of the possibility of occurrence of an unplanned maintenance work estimated by the maintenance work occurrence possibility estimation unit and the actual maintenance cost of the plasma processing apparatus calculated by the actual maintenance cost calculation unit.SELECTED DRAWING: Figure 1 【課題】プラズマ処理装置において、発生し得る計画外保守の発生を事前に予測し、必要な保守作業および当該作業をどの時点の計画保守に組み込むべきかを、優先する保守コストの観点から即時に判断できるようにする。【解決手段】装置診断装置を、プラズマ処理装置に装着したセンサの出力を受信してプラズマ処理装置の劣化度を推定する劣化度推定部と、この劣化度推定部で推定した劣化度に基づいて当初の保守計画に含まれていない計画外の保守作業が発生する確率を算出する保守作業発生確率推定部と、実績保守コストを算出する実績保守コスト算出部と、保守作業発生確率推定部で推定した計画外の保守作業が発生する確率と実績保守コスト算出部で算出したプラズマ処理装置の実績保守コストとに基づいて計画外の保守作業を組み込んだ当初の保守計画を修正した保守計画修正案を出力する計画組込時保守コスト算出部とを備えて構成した。【選択図】 図１