MEASUREMENT INSTRUMENT

• Main Authors: YOKOYAMA KIMIHIRO, HATANAKA TAKAYUKI
• Format: Patent
• Language: English; Japanese
• Published: 07.07.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To provide a technology to suppress damage of an operational amplifier caused by an ESD.SOLUTION: A measurement instrument according to an exemplary embodiment includes a base substrate, a sensor chip provided on the base substrate, and a circuit board provided on the base substrate. The sensor chip includes a sensor unit including a signal electrode having a front surface crossing a radial direction of the base substrate, a guard electrode arranged on a back side of the signal electrode, and a first ground electrode arranged on a back side of the guard electrode. The sensor chip includes a second ground electrode extending along a lower surface of the sensor unit. Only an insulating material is filled between the second ground electrode and the sensor unit.SELECTED DRAWING: Figure 7 【課題】ＥＳＤに起因するオペアンプの損傷を抑制する技術を提供する。【解決手段】例示的実施形態に係る測定器は、ベース基板と、ベース基板に設けられたセンサチップと、ベース基板に設けられた回路基板と、を備える。センサチップは、ベース基板の径方向に交差する前面を有するシグナル電極と、シグナル電極の後側に配置されるガード電極と、ガード電極の後側に配置される第１グランド電極と、を含むセンサ部を備える。センサチップは、センサ部の下面に沿って延在する第２グランド電極を含む。第２グランド電極とセンサ部との間は、絶縁材料だけで満たされている。【選択図】図７