SURFACE SHAPE INFORMATION ACQUISITION DEVICE USING MULTIPLEX LIGHT SOURCE

• Main Authors: JUNG SIK KOO, KANG PIL-SUNG, JAE GWAN CHOI, SUNG SOO WOO
• Format: Patent
• Language: English; Japanese
• Published: 06.07.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; PHYSICS; SEMICONDUCTOR DEVICES; TESTING

To provide a surface shape information acquisition device using a multiplex light source, capable of extending the depth measurement range of the surface shape of a sample by using the multiplex light source having a different wavelength.SOLUTION: The surface shape information acquisition device using a multiplex light source includes a first light source part which generates and outputs first light having a first wavelength, a first beam splitter which divides the first light made incident from the first light source part into first split light and second split light, a second light source part which generates and outputs second light having a second wavelength, a second beam splitter which divides the second light made incident from the second light source part into third split light and fourth split light, a sample light forming part on which the second split light and the fourth split light are made incident and which makes them incident on the sample, to form first sample light and second sample light, and an imaging part which receives the first sample light and the second sample light and receives first reference light formed by reflecting the first split light from a reference mirror and second reference light formed by reflecting the third split light from the reference mirror, to generate an interference signal.SELECTED DRAWING: Figure 1 【課題】波長の異なる多重光源を用いて、サンプルの表面形状の深さ測定範囲を拡張する、多重光源を用いた表面形状情報獲得装置を提供する。【解決手段】多重光源を用いた表面形状情報獲得装置は、第１波長の第１光を生成して出力する第１光源部；第１光源部から入射する第１光を、第１分割光と第２分割光に分割する第１ビームスプリッタ；第２波長の第２光を生成して出力する第２光源部；第２光源部から入射する前記第２光を、第３分割光と第４分割光に分割する第２ビームスプリッタ；第２分割光と第４分割光が入射され、これをサンプルに入射させて、第１サンプル光及び第２サンプル光を形成させるサンプル光形成部；第１サンプル光及び第２サンプル光を受光し、第１分割光が基準ミラーから反射して形成された第１基準光と、第３分割光が基準ミラーから反射して形成された第２基準光を受光して、干渉信号を生成する撮像部；を含むことを特徴とする。【選択図】図１