VACUUM PUMP, VACUUM PUMP CONSTITUENT PART, AND MANUFACTURING METHOD OF VACUUM PUMP

• Main Author: KABASAWA TSUYOSHI
• Format: Patent
• Language: English; Japanese
• Published: 19.06.2023
• Subjects: ADDITIVE MANUFACTURING TECHNOLOGY; ADDITIVE MANUFACTURING, i.e. MANUFACTURING OFTHREE-DIMENSIONAL [3-D] OBJECTS BY ADDITIVE DEPOSITION, ADDITIVEAGGLOMERATION OR ADDITIVE LAYERING, e.g. BY 3-D PRINTING,STEREOLITHOGRAPHY OR SELECTIVE LASER SINTERING; BLASTING; HEATING; LIGHTING; MECHANICAL ENGINEERING; NON-POSITIVE DISPLACEMENT PUMPS; PERFORMING OPERATIONS; POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS; TRANSPORTING; WEAPONS

To provide a vacuum pump which is high in reflection accuracy of a gas molecule at each layer.SOLUTION: A vacuum pump comprises a blade exhaust mechanism for exhausting gas by a fixed blade and a rotating blade 102, at least one of the rotating blade 102 and the fixed blade is three-dimensionally molded by laminating molding materials, and at least a part of an inclination face which is formed by the three-dimensional molding is created by using a three-dimensional molding device 280 being reflection accuracy improvement means for improving the reflection accuracy of a gas molecule. The reflection accuracy improvement means is performed in a lamination direction of the three-dimensional molding, and the lamination is performed in a radial direction of the blade exhaust mechanism.SELECTED DRAWING: Figure 8 【課題】各層におけるガス分子の反射精度が高い真空ポンプを提供する。【解決手段】固定翼と回転翼１０２とでガスの排気を行う翼排気機構を備え、回転翼１０２及び固定翼のうちの少なくとも一方が、造形材料を積層して立体造形されており、立体造形により形成された傾斜面の少なくとも一部が、ガス分子の反射精度を向上させる反射精度向上手段である立体造形装置２８０を用いて作製されている。反射精度向上手段が立体造形の積層方向によるものであって、積層が翼排気機構の径方向に行われている。【選択図】図８