FOREIGN MATTER INSPECTION DEVICE

• Main Author: OKAMIDO AKIRA
• Format: Patent
• Language: English; Japanese
• Published: 16.05.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING; TESTING STATIC OR DYNAMIC BALANCE OF MACHINES ORSTRUCTURES; TESTING STRUCTURES OR APPARATUS NOT OTHERWISE PROVIDED FOR

To improve the accuracy of detecting foreign matter that is included in a test object having a planar light source.SOLUTION: An imaging device 10 generates a first measurement image which is composed of the luminance value of light emitted from a planar light source 52 which is a test object 1. A wavelength selection filter 21 is located between the planar light source 52 and the imaging device 10 in the imaging direction of the imaging device 10. A control device 11 detects foreign matter of the test object 1 using a measurement image. In a specific wavelength region, the intensity of spectral characteristic of the planar light source 52 is larger than the intensity of spectral characteristic of foreign matter. The wavelength selection filter 21 does not allow light of a specific wavelength region to pass through and allows light not included in the specific wavelength region to pass through.SELECTED DRAWING: Figure 1 【課題】面状光源を有する検査対象に含まれる異物の検出精度を向上させる。【解決手段】撮像装置１０は、検査対象１の面状光源５２から出射される光の輝度値から構成される第１測定画像を生成する。波長選択フィルタ２１は、撮像装置１０の撮像方向において、面状光源５２と撮像装置１０との間に配置されている。制御装置１１は、測定画像を用いて検査対象１の異物を検出する。特定波長域において、面状光源５２の分光特性の強度は、異物の分光特性の強度よりも大きい。波長選択フィルタ２１は、特定波長域の光を通過させず、特定波長域に含まれない光を通過させる。【選択図】図１