HOT ULTRAPURE WATER PRODUCTION SYSTEM STARTUP METHOD, STARTUP PROGRAM, AND HOT ULTRAPURE WATER PRODUCTION SYSTEM

• Main Author: IIYAMA MASAMITSU
• Format: Patent
• Language: English; Japanese
• Published: 16.05.2023
• Subjects: BASIC ELECTRIC ELEMENTS; CHEMISTRY; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; METALLURGY; PERFORMING OPERATIONS; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL; SEMICONDUCTOR DEVICES; SEPARATION; TRANSPORTING; TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE

To shorten a start-up time of a hot ultrapure water production system while suppressing deterioration of hot ultrapure water piping.SOLUTION: There is provided a method for starting up a warm ultrapure water production system 12 for producing warm ultrapure water by raising a temperature of ultrapure water to a water supply temperature for supplying to a use point 24, in which heated ultrapure water heated to a temperature higher than room temperature and cooled water lowered to a temperature lower than a raised temperature are alternately passed through hot ultrapure water piping through which warm ultrapure water flows, within the water temperature range above room temperature and below the supply water temperature.SELECTED DRAWING: Figure 2 【課題】温超純水配管の劣化を抑制しつつ、温超純水製造システムの立ち上げ時間を短くする。【解決手段】超純水をユースポイント２４への供給水温に昇温し温超純水を製造する温超純水製造システム１２の立ち上げ方法であって、常温以上で且つ供給水温以下の水温範囲内で、超純水を常温よりも高温に昇温した昇温水と、昇温水よりも低温に降温した降温水と、を温超純水が流れる温超純水配管に交互に通水する。【選択図】図２