IMPEDANCE MATCHING DEVICE AND PROCESSING DEVICE

• Main Authors: TANAKA MASAOKI, KOJIMA KUNIO, IMAI ATSUSHI, TATEWANA YOSHIHIKO, MORI SADAO
• Format: Patent
• Language: English; Japanese
• Published: 12.05.2023
• Subjects: BASIC ELECTRONIC CIRCUITRY; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS; RESONATORS

To suppress signal fluctuations for a circuit that switches between implementation and non-implementation of impedance matching.SOLUTION: An impedance matching device having an impedance matching circuit that matches impedance between a high frequency power supply and a load includes a control circuit that controls the impedance matching circuit, a switching circuit that has a photocoupler and switches between operation and non-operation of the control circuit on the basis of a signal transmitted from the outside via the photocoupler, a circuit board on which the switching circuit is mounted, a conductive housing containing the impedance matching circuit, a non-conductive stud provided in the housing and supporting the circuit board, and a capacitor placed between the output terminal of the photocoupler and the ground.SELECTED DRAWING: Figure 1 【課題】インピーダンス整合の実施と不実施とを切り替える回路に対する信号の変動を抑制する。【解決手段】インピーダンス整合装置は、高周波電源と負荷とのインピーダンスを整合するインピーダンス整合回路を有するインピーダンス整合装置であって、インピーダンス整合回路を制御する制御回路と、フォトカプラを有し、外部からフォトカプラを介して伝達された信号に基づいて制御回路の動作と非動作とを切り替える切替回路と、切替回路が実装された回路基板と、インピーダンス整合回路を収容する導電性の筐体と、筐体に設けられ、回路基板を支持する非導電性のスタット、フォトカプラの出力端子とグランドとの間に配置されたコンデンサと、を備える。【選択図】図１