SURFACE TREATMENT APPARATUS AND MEMBRANE PROTECTION MEMBER

To provide a surface treatment apparatus and a membrane protection member capable of preventing breakage of an ion conductive membrane.SOLUTION: An apparatus of the invention includes: a housing which is arranged opposite to an object to be treated and can form a liquid chamber therein; an electrode...

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Bibliographic Details
Main Authors SATO TOYOKI, TERAYAMA TAKAO
Format Patent
LanguageEnglish
Japanese
Published 09.05.2023
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Summary:To provide a surface treatment apparatus and a membrane protection member capable of preventing breakage of an ion conductive membrane.SOLUTION: An apparatus of the invention includes: a housing which is arranged opposite to an object to be treated and can form a liquid chamber therein; an electrode arranged in the housing; an ion conducting membrane arranged between the liquid chamber and the object to be treated; a first membrane protection member arranged between the object to be treated and the ion conducting membrane; and a power supply unit which applies a voltage between the electrode and the object to be treated, wherein the first membrane protection member includes a first membrane support portion that supports the ion conducting membrane; and by applying a voltage between the electrode and the object to be treated, the surface of the object is treated by electrolysis through the ion conducting membrane and the first membrane support portion.SELECTED DRAWING: Figure 1A 【課題】イオン伝導膜の破損を防止可能な表面処理装置及び膜保護部材。【解決手段】被処理物と対向して配置され、内部に液室を形成可能なハウジングと、前記ハウジング内に配された電極と、前記液室と前記被処理物との間に配置されたイオン伝導膜と、前記被処理物と前記イオン伝導膜との間に配された第1膜保護部材と、前記電極と前記被処理物との間に電圧を印加する電源部とを備え、前記第1膜保護部材は、前記イオン伝導膜を支持する第1膜支持部を含み、前記電極と前記被処理物との間に電圧を印加することで、前記イオン伝導膜及び前記第1膜支持部を介した電気分解により前記被処理物の表面を処理する。【選択図】図1A
Bibliography:Application Number: JP20220163403