SUBSTRATE SUCTION MEMBER, ELASTIC SEAL ASSEMBLY, TOP RING, AND SUBSTRATE TREATMENT APPARATUS

• Main Authors: TAJIMA KAZUHIRO, KASHIWAGI MAKOTO, FURUSAWA MANATO
• Format: Patent
• Language: English; Japanese
• Published: 20.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; PERFORMING OPERATIONS; POLISHING; SEMICONDUCTOR DEVICES; TRANSPORTING

To surely suck a substrate regardless of flatness of a sucked surface of a substrate.SOLUTION: A substrate suction member 330 includes: a porous member 334 having a substrate suction surface 334a for sucking a substrate WF and a decompression part 334b communicating with decompression means; a shielding member 332 having a first shielding member 332-1 for shielding a surface 334c opposite to the substrate suction surface 334a of the porous member 334, and a frame-like second shielding member 332-2 for shielding at least a part of a side face 334d of the porous member 334; and a frame-like elastic seal member 336 mounted on the second shielding member 332-2 so as to surround the porous member 334, and having a contact surface 336a brought into contact with the substrate WF.SELECTED DRAWING: Figure 4 【課題】基板の被吸着面の平坦度に関わらず基板を確実に吸着する。【解決手段】基板吸着部材３３０は、基板ＷＦを吸着するための基板吸着面３３４ａおよび減圧手段と連通する減圧部３３４ｂを有する多孔質部材３３４と、多孔質部材３３４の基板吸着面３３４ａとは反対側の面３３４ｃを遮蔽する第１の遮蔽部材３３２－１および多孔質部材３３４の側面３３４ｄの少なくとも一部を遮蔽する枠状の第２の遮蔽部材３３２－２を有する遮蔽部材３３２と、多孔質部材３３４を囲むように第２の遮蔽部材３３２－２に取り付けられ、基板ＷＦと接触する接触面３３６ａを有する枠状の弾性シール部材３３６と、を含む。【選択図】図４