IMMERSION DIFFRACTION ELEMENT AND METHOD OF MANUFACTURING THE SAME
To provide an immersion diffraction element which is easy to manufacture and offers improved design flexibility of a diffractive portion.SOLUTION: An immersion diffraction element 1 is provided, comprising a prism portion 2 and a diffractive portion 4. The prism portion 2 and the diffractive portion...
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Main Author | |
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Format | Patent |
Language | English Japanese |
Published |
17.04.2023
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Subjects | |
Online Access | Get full text |
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Summary: | To provide an immersion diffraction element which is easy to manufacture and offers improved design flexibility of a diffractive portion.SOLUTION: An immersion diffraction element 1 is provided, comprising a prism portion 2 and a diffractive portion 4. The prism portion 2 and the diffractive portion 4 are made of amorphous glass.SELECTED DRAWING: Figure 1
【課題】製造が容易であり、かつ回折部の設計自由度を向上させることができる、イマージョン回折素子を提供する。【解決手段】プリズム部2と、回折部4とを備え、プリズム部2及び回折部4が、非晶質ガラスにより構成されている、イマージョン回折素子1。【選択図】図1 |
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Bibliography: | Application Number: JP20220109880 |