SPECIMEN SUPPORT AND IONIZATION METHOD

• Main Authors: KOTANI MASAHIRO, OMURA TAKAYUKI
• Format: Patent
• Language: English; Japanese
• Published: 13.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide a specimen support capable of appropriately implementing processing for transferring a specimen to be ionized on a surface of a substrate, and an ionization method.SOLUTION: A specimen support 1A of an embodiment comprises: a support substrate 2 including a support surface 2a; a sheet-like adhesive layer 3 provided on the support surface 2a; an ionization substrate 4 provided on the support surface 2a via the adhesive layer 3, the ionization substrate 4 including a first surface 4a opposed to the adhesive layer 3, a second surface 4b at an opposite side of the first surface 4a, and a plurality of through holes 4c opening in at least the second surface 4b; and a protective film 6 on a sheet covering a part of the second surface 4b of the ionization substrate 4 and provided removably. The ionization substrate 4 includes a measurement region R1 for transferring a specimen to be measured and a calibration region R2 for calibration. The protective film 6 is provided so as to cover at least the entire calibration region R2.SELECTED DRAWING: Figure 1 【課題】基板の表面にイオン化対象の試料を転写する処理を好適に実施することができる試料支持体及びイオン化方法を提供する。【解決手段】一実施形態の試料支持体１Ａは、支持面２ａを有する支持基板２と、支持面２ａ上に設けられたシート状の接着層３と、接着層３を介して支持面２ａ上に設けられたイオン化基板４であって、接着層３に面する第１表面４ａと、第１表面４ａとは反対側の第２表面４ｂと、少なくとも第２表面４ｂに開口する複数の貫通孔４ｃと、を有するイオン化基板４と、イオン化基板４の第２表面４ｂの一部を覆うと共に、取り外し可能に設けられたシート上の保護フィルム６と、を備える。イオン化基板４は、測定対象の試料を転写させるための測定領域Ｒ１と、校正用の校正領域Ｒ２と、を有する。保護フィルム６は、少なくとも校正領域Ｒ２の全体を覆うように設けられている。【選択図】図１