MAGNETIC SENSOR

• Main Authors: MAKINO KENZO, WATABE MORIYA
• Format: Patent
• Language: English; Japanese
• Published: 03.04.2023
• Subjects: ELECTRICITY; MEASURING; MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES; PHYSICS; TESTING

To realize a magnetic sensor capable of reducing a strength of a magnetic field for setting/resetting magnetization of magnetic detection elements each disposed on an inclined surface.SOLUTION: A magnetic sensor 1 includes: a substrate 301 including a top surface 301a; an insulating layer 305 including an inclined surface 305e; and a MR element 50 disposed on the inclined surface 305e. The MR element 50 includes a first side surface 50c and a second side surface 50d. The first side surface 50c is located at a position forward in a first direction D1 that is one direction along the inclined surface 305e. The second side surface 50d is located at a position forward in a second direction D2 that is another direction along the inclined surface 305e. The MR element 50 includes a first non-constant portion 501 in which a gap between an upper end Ec1 of the first side surface 50c and an upper end Ed1 of the second side surface 50d becomes smaller along a longitudinal direction D3.SELECTED DRAWING: Figure 9 【課題】傾斜面の上に配置された磁気検出素子の磁化をセット／リセットするための磁界の強度を小さくできる磁気センサを実現する。【解決手段】磁気センサ１は、上面３０１ａを有する基板３０１と、傾斜面３０５ｅを有する絶縁層３０５と、傾斜面３０５ｅの上に配置されたＭＲ素子５０とを備えている。ＭＲ素子５０は、第１の側面５０ｃと第２の側面５０ｄとを有している。第１の側面５０ｃは、傾斜面３０５ｅに沿った一方向である第１の方向Ｄ１の先に位置している。第２の側面５０ｄは、傾斜面３０５ｅに沿った他の一方向である第２の方向Ｄ２の先に位置している。ＭＲ素子５０は、長手方向Ｄ３に沿って第１の側面５０ｃの上端Ｅｃ１と第２の側面５０ｄの上端Ｅｄ１との間隔が小さくなる第１の変化部分５０１を含んでいる。【選択図】図９