FORMATION METHOD FOR CONDUCTIVE MEMBER AND FORMATION METHOD FOR CHANNEL

• Main Authors: AKIYAMA KOJI, WARASHINA HISASHI, TAMURA TOMOHIRO
• Format: Patent
• Language: English; Japanese
• Published: 03.04.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a formation method for a conductive member capable of enlarging a particle diameter of a crystal particle with high controllability and easily, and a formation method for a channel.SOLUTION: First of all, a first portion containing a first element constituting a conductive member to be obtained and a second element that causes an eutectic reaction with the first element, and a second portion containing a third element to form an inter-metal compound with the second element are formed on a substrate. Next, the first portion is brought into a liquid-phase state, a temperature of the substrate is then adjusted, and a primary crystal of the first element is formed. Next, in a state where the temperature of the substrate is maintained at the same temperature, the second element is diffused from the first portion to the second portion, a ratio of a crystal of the first element in the first portion with respect to a liquid phase is increased, and a crystal particle of the first element is grown. Next, the first portion after end of the diffusion of the second element to the second portion is defined as the conductive member including the crystal particles of the first element.SELECTED DRAWING: Figure 3 【課題】制御性良くかつ簡易に結晶粒を大粒径化することができる導電性部材の形成方法およびチャネルの形成方法を提供する。【解決手段】まず、得ようとする導電性部材を構成する第１元素と、第１元素と共晶反応を生じる第２元素とを含む第１部分と、第２元素と金属間化合物を形成する第３元素を含む第２部分とを基板上に形成する。次に、第１部分を液相状態にしてから基板の温度を調整して第１元素の初晶を晶出させる。次に、基板の温度を同じ温度に維持した状態で、第２元素を第１部分から第２部分に拡散させて、第１部分における第１元素の結晶の液相に対する比率を増加させ、第１元素の結晶粒を成長させる。次に、第２元素の第２の部分への拡散が終了した後の第１部分を第１元素の結晶粒を有する導電性部材とする。【選択図】図３