NOZZLE INSPECTION METHOD, NOZZLE INSPECTION DEVICE AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME

• Main Authors: KIM DAE SOON, SON SANG UK, HYUN YONG TAK
• Format: Patent
• Language: English; Japanese
• Published: 08.03.2023
• Subjects: CORRECTION OF TYPOGRAPHICAL ERRORS; i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; LINING MACHINES; PERFORMING OPERATIONS; PRINTING; SELECTIVE PRINTING MECHANISMS; STAMPS; TRANSPORTING; TYPEWRITERS

To provide a nozzle inspection method that can accurately detect defect of an inkjet head nozzle within a short time, and to provide a nozzle inspection device.SOLUTION: A nozzle inspection method includes the steps of: discharging a number of droplets within a first interest region of a substrate u...