NOZZLE INSPECTION METHOD, NOZZLE INSPECTION DEVICE AND SUBSTRATE PROCESSING DEVICE INCLUDING THE SAME

To provide a nozzle inspection method that can accurately detect defect of an inkjet head nozzle within a short time, and to provide a nozzle inspection device.SOLUTION: A nozzle inspection method includes the steps of: discharging a number of droplets within a first interest region of a substrate u...

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Bibliographic Details
Main Authors KIM DAE SOON, SON SANG UK, HYUN YONG TAK
Format Patent
LanguageEnglish
Japanese
Published 08.03.2023
Subjects
CORRECTION OF TYPOGRAPHICAL ERRORS
i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME
LINING MACHINES
PERFORMING OPERATIONS
PRINTING
SELECTIVE PRINTING MECHANISMS
STAMPS
TRANSPORTING
TYPEWRITERS
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Summary:To provide a nozzle inspection method that can accurately detect defect of an inkjet head nozzle within a short time, and to provide a nozzle inspection device.SOLUTION: A nozzle inspection method includes the steps of: discharging a number of droplets within a first interest region of a substrate using a first nozzle to form an inspection pattern; and determining whether the first nozzle is defective or not on the basis of the inspection pattern.SELECTED DRAWING: Figure 1 【課題】短時間内にインクジェットヘッドノズルの不良を正確に検出できるノズル検査方法およびノズル検査装置が提供されること。【解決手段】前記ノズル検査方法は第１ノズルを用いて基板の第１関心領域内に多数の液滴を吐出し、検査パターンを形成し、前記検査パターンに基づいて、前記第１ノズルが不良か否かを判断する。【選択図】図１
Bibliography:Application Number: JP20220127625