IMAGE SENSOR

• Main Authors: KIM SEUNG SIK, JUNG JEYEOUN, JEON JEHUN, LIM KANGMOOK
• Format: Patent
• Language: English; Japanese
• Published: 02.03.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC COMMUNICATION TECHNIQUE; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; PICTORIAL COMMUNICATION, e.g. TELEVISION; SEMICONDUCTOR DEVICES

To provide an image sensor that has improved quality and productivity.SOLUTION: An image sensor of the present invention includes: a substrate that includes a first surface and a second surface opposite to each other; a plurality of unit pixels that each include a photoelectric conversion layer in the substrate; a pixel separation pattern that extends from the first surface to the second surface and separates the unit pixels from each other; a surface insulating film on the second surface; a wiring structure that is arranged on the first surface and includes a first inter-wiring insulating film and a wiring pattern in the first inter-wiring insulating film; a micro-lens that is arranged on the second surface in a first area; and a light-shielding film that includes, in a second area, a horizontal light-shielding film extending along a top face of the surface insulating film, and a vertical light-shielding film penetrating the surface insulating film and the substrate and electrically connected with the wiring pattern. The light-shielding film is electrically connected with the pixel separation pattern.SELECTED DRAWING: Figure 5 【課題】本発明は品質および生産性が向上したイメージセンサを提供する。【解決手段】本発明のイメージセンサは、互いに反対になる第１面および第２面を含む基板と、基板内で光電変換層を含む複数の単位ピクセルと、第１面から第２面まで延在し、それぞれの単位ピクセルを分離するピクセル分離パターンと、第２面上の表面絶縁膜と、第１面上に配置され、第１配線間絶縁膜および第１配線間絶縁膜内の配線パターンを含む配線構造体と、第１領域で、第２面上に配置されるマイクロレンズと、第２領域で、表面絶縁膜の上面に沿って延在する水平遮光膜、および表面絶縁膜と基板とを貫通し、配線パターンと電気的に接続される垂直遮光膜を含む遮光膜とを含み、遮光膜はピクセル分離パターンと電気的に接続される。【選択図】図５