OPTICAL PROPERTY EVALUATION DEVICE

• Main Authors: TERAOKA YOSHITAKA, ABE YOSHIHISA, UDA TAKUSHI
• Format: Patent
• Language: English; Japanese
• Published: 22.02.2023
• Subjects: INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES; MEASURING; PHYSICS; TESTING

To provide an optical property evaluation device capable of solving problems while suppressing increase in a size of the device and increase in measurement time such as although capable of imaging at high spatial resolution but unable to acquire spectral data, or capable of acquiring spectral data but unable to acquire data at high spatial resolution.SOLUTION: A surface of a measurement object 100 is locally illuminated with illumination light that has intensity in a wavelength band including the visible light region from the illumination means 1. One-dimensionally spatially resolving a measuring range 12 including both light from a part or all of an illuminated point 11 and the light from a non-directly illuminated point 13 near the illuminated point out of the light emitted from the surface of the object to be measured, is executed. The light taken in from each spatially resolved measurement point is dispersed and received by the imaging means 5 to take an image.SELECTED DRAWING: Figure 1 【課題】高い空間解像度で撮像できるが分光データを取得できないとか、分光データを取得できるが高い空間解像度でデータを取得できないという課題を、装置の大型化と測定時間の増加を抑えた上で解決できる光学特性測定装置を提供する。【解決手段】照明手段１からの可視光領域を含む波長帯に強度を持った照明光で、測定対象物１００の表面を局所的に照明したときの、測定対象物の表面より出射される光のうち、照明箇所１１の一部もしくは全部からの光と、照明箇所付近の直接照明されていない箇所１３からの光のどちらもを含む測定範囲１２を一次元的に空間分解し、空間分解された各測定箇所から取り込んだ光を分光して撮像手段５により受光し撮像する。【選択図】図１