PROCESSING SYSTEM

• Main Authors: KAWAI AKIHITO, KAJIWARA YUSUKE
• Format: Patent
• Language: English; Japanese
• Published: 09.02.2023
• Subjects: BASIC ELECTRIC ELEMENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING; DRESSING OR CONDITIONING OF ABRADING SURFACES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS; GRINDING; MACHINE TOOLS; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS; MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; MEASURING; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS; MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS; METAL-WORKING NOT OTHERWISE PROVIDED FOR; PERFORMING OPERATIONS; PHYSICS; POLISHING; SEMICONDUCTOR DEVICES; TESTING; TRANSPORTING

To check whether or not a factor of a damage on a workpiece or contamination or the like adhering to the workpiece exists before processing.SOLUTION: A processing system includes a processing device for processing a workpiece, and an inspection device for inspecting the workpiece. The inspection device includes a camera unit for photographing the workpiece and acquiring an image, and a recording part for recording the image acquired when the camera unit photographs the workpiece. The recording part records an image before processing acquired by photographing the workpiece before processed by the processing device by the camera unit, and records an image after processing acquired by photographing the workpiece after processed by the processing device by the camera unit.SELECTED DRAWING: Figure 11 【課題】被加工物の傷や被加工物に付着したコンタミネーション等の要素が加工の前から存在していたか否かを加工後に確認する。【解決手段】被加工物を加工する加工装置と、該被加工物を検査する検査装置と、を有する加工システムであって、該検査装置は、該被加工物を撮影し画像を取得するカメラユニットと、該カメラユニットで該被加工物を撮影して取得された該画像を記録する記録部と、を有し、該記録部は、該加工装置で加工される前の該被加工物を該カメラユニットで撮影して得られた加工前画像を記録し、該加工装置で加工された後の該被加工物を該カメラユニットで撮影して得られた加工後画像を記録する。【選択図】図１１