VACUUM VALVE

To provide a vacuum valve capable of driving the arc generated between electrodes in a circumferential direction without stagnation at a specific position when opening the vacuum valve (when a pair of electrodes is separated).SOLUTION: A vacuum valve includes a pair of electrodes E1, E2 separably po...

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Bibliographic Details
Main Authors HIMATA YUKIHIKO, NIWA YOSHIMITSU, DAIBO AKIRA, YOSHIDA TAKESHI
Format Patent
LanguageEnglish
Japanese
Published 02.02.2023
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Summary:To provide a vacuum valve capable of driving the arc generated between electrodes in a circumferential direction without stagnation at a specific position when opening the vacuum valve (when a pair of electrodes is separated).SOLUTION: A vacuum valve includes a pair of electrodes E1, E2 separably positioned opposite to each other and having electrode facing surfaces E1s, E2s separated by a plurality of grooves 12, 13. In the pair of electrodes, the current density of the facing regions 8a, 10a adjacent to the electrode facing surface is higher than the current density other than facing region.SELECTED DRAWING: Figure 2 【課題】真空バルブの開放時(一対の電極を離間させたとき)、電極相互間に発生したアークを、特定位置に停滞させること無く、円周方向に駆動させることが可能な真空バルブを提供する。【解決手段】離接可能に対向して位置付けられ、複数の溝部12,13によって分画された電極対向面E1s,E2sを備えた一対の電極E1,E2を有し、一対の電極において、電極対向面に隣接した対向領域8a,10aの電流密度は、対向領域以外の電流密度よりも高くなっている。【選択図】図2
Bibliography:Application Number: JP20210120677