PROCESSING LIQUID TANK, PROCESSING DEVICE, WIRE SAW AND POLISHING DEVICE

To provide a processing liquid tank capable of uniformly dispersing a processing liquid, for improving processing accuracy and processing efficiency.SOLUTION: A processing liquid tank 1 has: a cylindrical peripheral wall part 2; a bottom 3 forming a bottom face of the processing liquid tank 1; an ag...

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Bibliographic Details
Main Authors YASUHARA SHIN, UEMURA NAOKI, ENDO KOJI, MURAYAMA RYO
Format Patent
LanguageEnglish
Japanese
Published 19.01.2023
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Summary:To provide a processing liquid tank capable of uniformly dispersing a processing liquid, for improving processing accuracy and processing efficiency.SOLUTION: A processing liquid tank 1 has: a cylindrical peripheral wall part 2; a bottom 3 forming a bottom face of the processing liquid tank 1; an agitation shaft 11; a motor 12 rotating the agitation shaft 11; an agitation blade 10 supported to one end side of the agitation shaft 11; and at least one baffle plate 20 formed so as to protrude from an inner face of the peripheral wall part 2 in an outside area of a rotation area of the agitation blade 10. The agitation blade 10 has a plate shaped member 13 which is formed so as to extend toward one side and the other side in a radial direction, so as to become symmetric with the agitation shaft 11 as a reference. The baffle plate 20 is configured so that an upper end side is at a height equal to or greater than a liquid level of a processing liquid, and a lower end side is separated from the bottom face. The agitation blade 10 is formed so that a whole length becomes 25-45% of an inner diameter of the peripheral wall part. The agitation blade 10 has an aperture 16, a protrusion part 15, and a chamfer part 17.SELECTED DRAWING: Figure 2 【課題】加工液を均一に分散させることにより加工精度や加工効率を向上させることが可能な加工液タンクを提供すること。【解決手段】加工液タンク1は、筒状の周壁部2と、加工液タンク1の底面を形成する底部3と、撹拌軸11と、撹拌軸11を回転させるモータ12と、撹拌軸11の一端側に支持された撹拌翼10と、撹拌翼10の回転領域の外側の領域において、周壁部2の内面から突出するように形成された少なくとも1つの邪魔板20とを有する。撹拌翼10は、撹拌軸11を基準として対称となるように、径方向一方側及び他方側に向けて延びるように形成された板状部材13を有し、邪魔板20は、上端側が、前記加工液の液面以上の高さとなるように配置され、下端側が、底面から離間するように配置される。撹拌翼10は、全長が周壁部の内径に対して25~45%の長さに形成される。撹拌翼10は、開孔16、突出部15、面取り部17を有する。【選択図】図2
Bibliography:Application Number: JP20210111844