HEAT TREATMENT DEVICE AND HEAT TREATMENT METHOD

• Main Authors: FURUKAWA MASAAKI, GOTO SHIGEHIRO
• Format: Patent
• Language: English; Japanese
• Published: 19.01.2023
• Subjects: BASIC ELECTRIC ELEMENTS; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR; ELECTRICITY; SEMICONDUCTOR DEVICES

To provide a heat treatment device and a heat treatment method, capable of easily determining whether or not a detection temperature value in each region of a heat treatment plate is proper in a short time.SOLUTION: A heat treatment device comprises: a conversion part that converts an output value of a plurality of temperature sensors into each detection temperature value; a power control part 411 that applies a plurality of power operation amounts corresponding to a plurality of regions to a power supply circuit 412 so that the plurality of detection temperature values are matched to a target temperature value; a storage part 450 that stores a proper operation amount that has to be applied to the power supply circuit by the power control part 411 in the case where the detection temperature value of each region obtained by the converter part is in a proper state; an operation amount acquisition part 440 that acquires the power operation amount in each region applied to the power supply circuit by the power control part 411; and a determination part 480 that determines whether or not the detection temperature value corresponding to each region is in the proper state on the basis of the proper operation amount in each region stored in the storage part 450 and the power operation amount of each region acquired by the operation amount acquisition part 440.SELECTED DRAWING: Figure 6 【課題】 熱処理プレートの各領域の検出温度値が適正であるか否かを短時間で容易に判定することが可能な熱処理装置および熱処理方法を提供する。【解決手段】熱処理装置は、複数の温度センサの出力値を検出温度値にそれぞれ変換する変換部と、複数の検出温度値が目標温度値に一致するように電力供給回路に複数の領域に対応する複数の電力操作量を与える電力制御部４１１と、変換部により得られる各領域の検出温度値が適正状態にあるとした場合において電力制御部４１１により電力供給回路に与えられるべき適正操作量を記憶する記憶部４５０と、電力制御部４１１により電力供給回路４１２に与えられる各領域の電力操作量を取得する操作量取得部４４０と、記憶部４５０に記憶された各領域の適正操作量と操作量取得部４４０により取得された各領域の電力操作量とに基づいて、各領域に対応する検出温度値が適正状態にあるか否かを判定する判定部４８０とを備える。【選択図】図６