SAMPLE PROCESSOR AND METHOD FOR PROCESSING INFORMATION

• Main Authors: ISHIKAWA YOSHIKAZU, NEGISHI TSUTOMU, KAWAHARA TAKASHI, KOZUKA MIHIRO, KIMURA TATSUTO
• Format: Patent
• Language: English; Japanese
• Published: 15.12.2022
• Subjects: BASIC ELECTRIC ELEMENTS; DETECTING MASSES OR OBJECTS; ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS; ELECTRICITY; GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; MEASURING; PHYSICS; TESTING

To provide a sample processor that can accurately determine timing of the end of processing.SOLUTION: A sample processor for processing a sample by irradiating the sample with an ion beam includes: an ion source for irradiating the sample with the ion beam; a shielding member arranged on the sample, for shielding the ion beam; a sample stage with a swing mechanism for rocking the sample and the shielding member; a transmissive illumination device for emitting illumination light that transmits through the sample; a camera for imaging the sample illuminated by the illumination light; and a processing unit for determining the end of processing on the basis of the image taken by the camera. The processing unit performs the processing of: acquiring an image; masking light leaking from a gap between the sample and the shielding member in the acquired image; detecting brightness of a non-masked region, which is the region of the image which is not masked; and determining the end of processing on the basis of the brightness of the non masked region.SELECTED DRAWING: Figure 12 【課題】加工の終了のタイミングを正確に判断できる試料加工装置を提供する。【解決手段】試料にイオンビームを照射して試料を加工する試料加工装置であって、試料にイオンビームを照射するイオン源と、試料上に配置され、イオンビームを遮蔽する遮蔽部材と、試料および遮蔽部材を揺動させるスイング機構を備えた試料ステージと、試料を透過照明する照明光を発する透過照明装置と、照明光で透過照明された試料を撮影するカメラと、カメラで撮影された画像に基づいて、加工の終了を判断する処理部と、を含み、処理部は、画像を取得する処理と、取得した画像において、試料と遮蔽部材との間の隙間から漏れる光をマスクする処理と、画像のマスクされたマスク領域を除いた非マスク領域の輝度を検出する処理と、非マスク領域の輝度に基づいて、加工の終了を判断する処理と、を行う。【選択図】図１２