DISPLACEMENT MEASUREMENT SYSTEM AND DISPLACEMENT MEASUREMENT METHOD

To reduce displacement measurement error in a displacement measurement system using a Hall element and a magnet.SOLUTION: A displacement measurement system 1 measures a displacement x of an inside member 20 relative to an outside member 10 in a predetermined direction X from a reference position. Th...

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Bibliographic Details
Main Authors SASADATE ATSUYA, TANAKA HIROKI, MORIYASU NOBUO, HASHIMOTO KOHEI
Format Patent
LanguageEnglish
Japanese
Published 08.12.2022
Subjects
MEASURING
MEASURING ANGLES
MEASURING AREAS
MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS
PHYSICS
TESTING
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Summary:To reduce displacement measurement error in a displacement measurement system using a Hall element and a magnet.SOLUTION: A displacement measurement system 1 measures a displacement x of an inside member 20 relative to an outside member 10 in a predetermined direction X from a reference position. The outside member has a first facing part 11 and a second facing part 12 facing each other in the predetermined direction. The inside member is positioned between the first facing part and the second facing part. A first measurement unit 2 has a first Hall element 30 fixed to the inner surface of the first facing part on the side of the inside member, and a first magnet 40 fixed to the outer surface of the inside member on the side of the first facing part, where the first Hall element detects the magnetic flux density of the first magnet to measure a first distance d1. A second measurement unit 3 has a second Hall element 31 fixed to the inner surface of the second facing part on the side of the inside member, and a second magnet 41 fixed to the outer surface of the inside member on the side of the second facing part, where the second Hall element detects the magnetic flux density of the second magnet to measure a second distance d2.SELECTED DRAWING: Figure 3 【課題】ホール素子と磁石を用いた変位測定システムにて、変位の測定誤差を低減する。【解決手段】変位測定システム１は、外側部材１０に対する内側部材２０の所定方向Ｘにおける基準位置からの変位ｘを測定する。外側部材は、所定方向に対向配置される第１対向部１１及び第２対向部１２を有する。内側部材は、第１対向部と第２対向部との間に配置される。第１測定部２は、第１対向部における内側部材側の内面に固定される第１ホール素子３０と、内側部材における第１対向部側の外面に固定される第１磁石４０とを有し、第１ホール素子が第１磁石の磁束密度を検出することで、第１距離ｄ１を測定する。第２測定部３は、第２対向部における内側部材側の内面に固定される第２ホール素子３１と、内側部材における第２対向部側の外面に固定される第２磁石４１とを有し、第２ホール素子が第２磁石の磁束密度を検出することで、第２距離ｄ２を測定する。【選択図】図３
Bibliography:Application Number: JP20210089289