PRESSURE SENSOR MODULE AND DISPENSER

• Main Authors: AONO TAKANORI, YAMAZAKI TATSUYA, KANAMARU MASATOSHI, SUZUKI YOICHIRO
• Format: Patent
• Language: English; Japanese
• Published: 25.11.2022
• Subjects: MEASURING; MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE; PHYSICS; TESTING

To provide a pressure sensor module and dispenser capable of improving the accuracy of pressure measurement.SOLUTION: A pressure sensor module includes: a flow path substrate having a flow path and a branch path; and a distortion detector for detecting pressure. The branch path branched from the flow path is connected to the distortion detector at one end; the distortion detector is partially arranged at least through a bonding layer so as to block the one end of the branch path; and a projection part is provided so as to surround the one end of the branch path.SELECTED DRAWING: Figure 3 【課題】圧力計測の精度を改善する圧力センサモジュールおよび分注装置を提供する。【解決手段】圧力センサモジュールは、流路および分岐路が形成された流路基板と、圧力を検出する歪検出部と、備える。前記分岐路は、前記流路から分岐し、一端において前記歪検出部に接続され、前記歪検出部は、前記分岐路の前記一端を塞ぐように、少なくとも部分的に接合層を介して配置され、前記分岐路の前記一端を囲むように突起部が設けられる。【選択図】図３